-
MIT News (December 2015): Nanodevices at one-hundredth the cost – New techniques for building microelectromechanical systems show promise
Microelectromechanical systems — or MEMS — were a $12 billion business in 2014. But that market is dominated by just a handful of devices, such as the accelerometers that reorient the screens of most smartphones. That’s because manufacturing MEMS has traditionally required sophisticated semiconductor fabrication facilities, which cost tens of millions of dollars to build.…
